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Practicalities and limitations of scanning capacitance microscopy for routine IC characterisation
Publication:
Practicalities and limitations of scanning capacitance microscopy for routine IC characterisation
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Date
1999
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Stephenson, Robert
;
De Wolf, Peter
;
Trenkler, Thomas
;
Hantschel, Thomas
;
Clarysse, Trudo
;
Jansen, Philippe
;
Vandervorst, Wilfried
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1935
since deposited on 2021-10-14
Acq. date: 2026-01-10
Citations
Metrics
Views
1935
since deposited on 2021-10-14
Acq. date: 2026-01-10
Citations