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GaN-on-Si mm-wave RF Devices Integrated in a 200mm CMOS Compatible 3-Level Cu BEOL

dc.contributor.authorParvais, Bertrand
dc.contributor.authorAlian, AliReza
dc.contributor.authorPeralagu, Uthayasankaran
dc.contributor.authorRodriguez, Raul
dc.contributor.authorYadav, Sachin
dc.contributor.authorKhaled, Ahmad
dc.contributor.authorElKashlan, Rana Y.
dc.contributor.authorPutcha, Vamsi
dc.contributor.authorSibaja-Hernandez, Arturo
dc.contributor.authorZhao, Ming
dc.contributor.authorWambacq, Piet
dc.contributor.authorCollaert, Nadine
dc.contributor.authorWaldron, Niamh
dc.date.accessioned2021-12-21T13:39:01Z
dc.date.available2021-12-06T02:06:49Z
dc.date.available2021-12-21T13:39:01Z
dc.date.issued2020
dc.identifier.issn2380-9248
dc.identifier.otherWOS:000717011600165
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38559.2
dc.sourceWOS
dc.titleGaN-on-Si mm-wave RF Devices Integrated in a 200mm CMOS Compatible 3-Level Cu BEOL
dc.typeProceedings paper
dc.contributor.imecauthorParvais, B.
dc.contributor.imecauthorAlian, A.
dc.contributor.imecauthorPeralagu, U.
dc.contributor.imecauthorRodriguez, R.
dc.contributor.imecauthorYadav, S.
dc.contributor.imecauthorKhaled, A.
dc.contributor.imecauthorElKashlan, R. Y.
dc.contributor.imecauthorPutcha, V
dc.contributor.imecauthorSibaja-Hernandez, A.
dc.contributor.imecauthorZhao, M.
dc.contributor.imecauthorWambacq, P.
dc.contributor.imecauthorCollaert, N.
dc.contributor.imecauthorWaldron, N.
dc.contributor.imecauthorParvais, Bertrand
dc.contributor.imecauthorAlian, AliReza
dc.contributor.imecauthorPeralagu, Uthayasankaran
dc.contributor.imecauthorRodriguez, Raul
dc.contributor.imecauthorYadav, Sachin
dc.contributor.imecauthorKhaled, Ahmad
dc.contributor.imecauthorElKashlan, Rana Y.
dc.contributor.imecauthorPutcha, Vamsi
dc.contributor.imecauthorSibaja-Hernandez, Arturo
dc.contributor.imecauthorZhao, Ming
dc.contributor.imecauthorWambacq, Piet
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorWaldron, Niamh
dc.contributor.orcidimecParvais, Bertrand::0000-0003-0769-7069
dc.contributor.orcidimecPeralagu, Uthayasankaran::0000-0001-9166-4408
dc.contributor.orcidimecRodriguez, Raul::0000-0002-4457-8942
dc.contributor.orcidimecKhaled, Ahmad::0000-0003-2892-3176
dc.contributor.orcidimecPutcha, Vamsi::0000-0003-1907-5486
dc.contributor.orcidimecZhao, Ming::0000-0002-0856-851X
dc.contributor.orcidimecWambacq, Piet::0000-0003-4388-7257
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.identifier.doi10.1109/IEDM13553.2020.9372056
dc.identifier.eisbn978-1-7281-8888-1
dc.source.numberofpages4
dc.source.peerreviewyes
dc.source.conferenceIEEE International Electron Devices Meeting (IEDM)
dc.source.conferencedateDEC 12-18, 2020
dc.source.conferencelocationSan Francisco, CA, USA
dc.source.journalna
imec.availabilityPublished - imec


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220.500.12860/38559.2*2021-12-21T13:33:30Zvalidation by library/open access desk
120.500.12860/385592021-12-06T02:06:49Z

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