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GaN-on-Si mm-wave RF Devices Integrated in a 200mm CMOS Compatible 3-Level Cu BEOL
dc.contributor.author | Parvais, B. | |
dc.contributor.author | Alian, A. | |
dc.contributor.author | Peralagu, U. | |
dc.contributor.author | Rodriguez, R. | |
dc.contributor.author | Yadav, S. | |
dc.contributor.author | Khaled, A. | |
dc.contributor.author | ElKashlan, R. Y. | |
dc.contributor.author | Putcha, V | |
dc.contributor.author | Sibaja-Hernandez, A. | |
dc.contributor.author | Zhao, M. | |
dc.contributor.author | Wambacq, P. | |
dc.contributor.author | Collaert, N. | |
dc.contributor.author | Waldron, N. | |
dc.date.accessioned | 2021-12-06T02:06:49Z | |
dc.date.available | 2021-12-06T02:06:49Z | |
dc.date.issued | 2020 | |
dc.identifier.issn | 2380-9248 | |
dc.identifier.other | WOS:000717011600165 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38559 | |
dc.source | WOS | |
dc.title | GaN-on-Si mm-wave RF Devices Integrated in a 200mm CMOS Compatible 3-Level Cu BEOL | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Parvais, B. | |
dc.contributor.imecauthor | Alian, A. | |
dc.contributor.imecauthor | Peralagu, U. | |
dc.contributor.imecauthor | Rodriguez, R. | |
dc.contributor.imecauthor | Yadav, S. | |
dc.contributor.imecauthor | Khaled, A. | |
dc.contributor.imecauthor | ElKashlan, R. Y. | |
dc.contributor.imecauthor | Putcha, V | |
dc.contributor.imecauthor | Sibaja-Hernandez, A. | |
dc.contributor.imecauthor | Zhao, M. | |
dc.contributor.imecauthor | Wambacq, P. | |
dc.contributor.imecauthor | Collaert, N. | |
dc.contributor.imecauthor | Waldron, N. | |
dc.identifier.doi | 10.1109/IEDM13553.2020.9372056 | |
dc.identifier.eisbn | 978-1-7281-8888-1 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.conference | IEEE International Electron Devices Meeting (IEDM) | |
dc.source.conferencedate | DEC 12-18, 2020 | |
imec.availability | Under review |
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