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Non-monotonic behaviour of the scanning capacitance microscope for large dynamic range samples

dc.contributor.authorStephenson, Robert
dc.contributor.authorVerhulst, Anne
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorCaymax, Matty
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T11:41:11Z
dc.date.available2021-10-14T11:41:11Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3855
dc.sourceIIOimport
dc.titleNon-monotonic behaviour of the scanning capacitance microscope for large dynamic range samples
dc.typeProceedings paper
dc.contributor.imecauthorVerhulst, Anne
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecVerhulst, Anne::0000-0002-3742-9017
dc.source.peerreviewno
dc.source.beginpage193
dc.source.endpage201
dc.source.conference5th International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors
dc.source.conferencelocation
imec.availabilityPublished - imec


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