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Investigating the Nucleation of AlOx and HfOx ALD on Polyimide: Influence of Plasma Activation
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Authors
Astoreca, Laura
;
Schaubroeck, David
;
Tabaei, Parinaz Saadat Esbah
;
Ghobeira, Rouba
;
Morent, Rino
;
De Geyter, Nathalie
;
Op de Beeck, Maaike
;
De Smet, Herbert
DOI
10.3390/coatings11111352
ISSN
2079-6412
Issue
11
Journal
COATINGS
Volume
11
Title
Investigating the Nucleation of AlOx and HfOx ALD on Polyimide: Influence of Plasma Activation
Publication type
Journal article
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2
20.500.12860/38582.2
*
2022-06-16T09:27:59Z
validation by library/open access desk
1
20.500.12860/38582
2021-12-09T02:03:50Z
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