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Morphology and defects in shallow trench isolation structures

dc.contributor.authorStuer, Cindy
dc.contributor.authorVan Landuyt, J.
dc.contributor.authorBender, Hugo
dc.contributor.authorRooyackers, Rita
dc.contributor.authorBadenes, Gonçal
dc.date.accessioned2021-10-14T11:42:04Z
dc.date.available2021-10-14T11:42:04Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3867
dc.sourceIIOimport
dc.titleMorphology and defects in shallow trench isolation structures
dc.typeProceedings paper
dc.contributor.imecauthorBender, Hugo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage443
dc.source.endpage446
dc.source.conferenceMicroscopy of Semiconducting Materials
dc.source.conferencedate22/03/1999
dc.source.conferencelocationOxford UK
imec.availabilityPublished - open access
imec.internalnotesInstitute of Physics Conference Series; Vol. 164


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