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A fully packaged electromagnetic microrelay

dc.contributor.authorTilmans, Harrie
dc.contributor.authorFullin, E.
dc.contributor.authorZiad, Hocine
dc.contributor.authorVan De Peer, Myriam
dc.contributor.authorKesters, J.
dc.contributor.authorVan Geffen, E.
dc.contributor.authorBergqvist, J.
dc.contributor.authorPantus, M.
dc.contributor.authorBeyne, Eric
dc.contributor.authorBaert, Kris
dc.contributor.authorNaso, F.
dc.date.accessioned2021-10-14T11:43:15Z
dc.date.available2021-10-14T11:43:15Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3881
dc.sourceIIOimport
dc.titleA fully packaged electromagnetic microrelay
dc.typeProceedings paper
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorZiad, Hocine
dc.contributor.imecauthorVan De Peer, Myriam
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.source.peerreviewno
dc.source.beginpage25
dc.source.endpage30
dc.source.conferenceProceedings of MEMS
dc.source.conferencedate17/01/1999
dc.source.conferencelocationOrlando, FL USA
imec.availabilityPublished - imec


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