Probing the properties of nitride thin films in 3-dimensions using a variable energy beam

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Authors
Trager-Cowan, C.; Middleton, P. J.; Mohammed, A.; Manson-Smith, S. K.; O'Donnell, K. P.; Van der Stricht, Wim; Moerman, Ingrid; Demeester, Piet
Conference
11th International Conference on Microscopy of Semiconducting Materials
Title
Probing the properties of nitride thin films in 3-dimensions using a variable energy beam
Publication type
Oral presentation
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