dc.contributor.author | Trager-Cowan, C. | |
dc.contributor.author | Treguer, J. F. | |
dc.contributor.author | Grimson, S. T. F. | |
dc.contributor.author | Osborne, I. | |
dc.contributor.author | Barisonzi, M. | |
dc.contributor.author | Middleton, P. G. | |
dc.contributor.author | Manson-Smith, S. K. | |
dc.contributor.author | Mohammed, A. | |
dc.contributor.author | O'Donnell, K. P. | |
dc.contributor.author | Van der Stricht, Wim | |
dc.contributor.author | Jacobs, Koen | |
dc.contributor.author | Moerman, Ingrid | |
dc.contributor.author | Demeester, Piet | |
dc.contributor.author | Wu, Ming Fang | |
dc.contributor.author | Vantomme, Andre | |
dc.date.accessioned | 2021-10-14T11:43:42Z | |
dc.date.available | 2021-10-14T11:43:42Z | |
dc.date.issued | 1999 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3886 | |
dc.source | IIOimport | |
dc.title | Probing nitride thin films in 3-dimensions using a variable energy electron beam | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Moerman, Ingrid | |
dc.contributor.imecauthor | Demeester, Piet | |
dc.contributor.imecauthor | Vantomme, Andre | |
dc.contributor.orcidimec | Moerman, Ingrid::0000-0003-2377-3674 | |
dc.contributor.orcidimec | Demeester, Piet::0000-0003-2810-3899 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | 1st UK Nitrides Consortium Conference | |
dc.source.conferencedate | 24/09/1999 | |
dc.source.conferencelocation | Glasgow UK | |
imec.availability | Published - open access | |