Show simple item record

Probing nitride thin films in 3-dimensions using a variable energy electron beam

dc.contributor.authorTrager-Cowan, C.
dc.contributor.authorTreguer, J. F.
dc.contributor.authorGrimson, S. T. F.
dc.contributor.authorOsborne, I.
dc.contributor.authorBarisonzi, M.
dc.contributor.authorMiddleton, P. G.
dc.contributor.authorManson-Smith, S. K.
dc.contributor.authorMohammed, A.
dc.contributor.authorO'Donnell, K. P.
dc.contributor.authorVan der Stricht, Wim
dc.contributor.authorJacobs, Koen
dc.contributor.authorMoerman, Ingrid
dc.contributor.authorDemeester, Piet
dc.contributor.authorWu, Ming Fang
dc.contributor.authorVantomme, Andre
dc.date.accessioned2021-10-14T11:43:48Z
dc.date.available2021-10-14T11:43:48Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3887
dc.sourceIIOimport
dc.titleProbing nitride thin films in 3-dimensions using a variable energy electron beam
dc.typeProceedings paper
dc.contributor.imecauthorMoerman, Ingrid
dc.contributor.imecauthorDemeester, Piet
dc.contributor.imecauthorVantomme, Andre
dc.contributor.orcidimecMoerman, Ingrid::0000-0003-2377-3674
dc.contributor.orcidimecDemeester, Piet::0000-0003-2810-3899
dc.source.peerreviewno
dc.source.beginpage91
dc.source.endpage94
dc.source.conferenceElectron Microscopy and Analysis 1999; Sheffield, UK. August 1999.
dc.source.conferencelocation
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record