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Electrical scanning probe techniques in semiconductor research

dc.contributor.authorTrenkler, Thomas
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorEyben, Pierre
dc.contributor.authorHaegeman, Bart
dc.contributor.authorStephenson, Robert
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T11:43:54Z
dc.date.available2021-10-14T11:43:54Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3888
dc.sourceIIOimport
dc.titleElectrical scanning probe techniques in semiconductor research
dc.typeOral presentation
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.conferenceDI-VEECO Users Workshop; September 1999; Bordeaux, France.
dc.source.conferencelocation
imec.availabilityPublished - imec


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