Authors

Trenkler, Thomas; Hantschel, Thomas; Stephenson, Robert; De Wolf, Peter; Hellemans, L.; Vandervorst, Wilfried; Malavé, A.; Büchel, D.; Oesterschulze, E.; Kulisch, W.; Niedermann, P.; Sulzbach, T.; Ohlsson, O.

Conference

Proceedings 5th International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Se

Title

Evaluating probes for "electrical" atomic force microscopy

Publication type

Proceedings paper

Embargo date

9999-12-31