Authors

Trenkler, Thomas; Hantschel, Thomas; Vandervorst, Wilfried; Hellemans, L.; Kulisch, W.; Oesterschulze, E.; Niedermann, P.; Sulzbach, T.

Conference

Design, Test, and Microfabrication of MEMS and MOEMS; 30 March - 1 April 1999; Paris, France.

Title

Characterization of conductive probes for atomic force microscopy

Publication type

Proceedings paper

Embargo date

9999-12-31