High-Q THz Photonic Crystal Cavity on a Low-Loss Suspended Silicon Platform

Akiki, Elias; Verstuyft, Matti; Kuyken, Bart; Walter, Benjamin; Faucher, Marc; Lampin, Jean-Francois; Ducournau, Guillaume; Vanwolleghem, Mathias

doi:10.1109/tthz.2020.3019928

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High-Q THz Photonic Crystal Cavity on a Low-Loss Suspended Silicon Platform

Date

2021

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https://doi.org/10.1109/tthz.2020.3019928

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Lampin, Jean-Francois

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Ducournau, Guillaume

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Vanwolleghem, Mathias

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IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY

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Acq. date: 2026-07-27

1904 since deposited on 2022-02-25

Acq. date: 2026-07-27

High-Q THz Photonic Crystal Cavity on a Low-Loss Suspended Silicon Platform

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