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EUV scattering from carbon nanotube pellicles: measurement and control
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Authors
Pollentier, Ivan
;
Luttgenau, Bernard
;
Brose, Sascha
;
Timmermans, Marina
;
Huyghebaert, Cedric
;
Brems, Steven
;
Gallagher, Emily
DOI
10.1117/1.JMM.20.2.021007
ISSN
1932-5150
Issue
2
Journal
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
Volume
20
Title
EUV scattering from carbon nanotube pellicles: measurement and control
Publication type
Journal article
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