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EUV scattering from carbon nanotube pellicles: measurement and control

dc.contributor.authorPollentier, Ivan
dc.contributor.authorLuttgenau, Bernard
dc.contributor.authorBrose, Sascha
dc.contributor.authorTimmermans, Marina
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorBrems, Steven
dc.contributor.authorGallagher, Emily
dc.date.accessioned2022-03-02T09:37:31Z
dc.date.available2022-03-02T09:37:31Z
dc.date.issued2021
dc.identifier.issn1932-5150
dc.identifier.otherWOS:000670414000009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39211
dc.sourceWOS
dc.titleEUV scattering from carbon nanotube pellicles: measurement and control
dc.typeJournal article
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorTimmermans, Marina
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorBrems, Steven
dc.contributor.imecauthorGallagher, Emily
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecBrems, Steven::0000-0002-0282-8528
dc.contributor.orcidimecTimmermans, Marina::0000-0001-9805-8259
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.identifier.doi10.1117/1.JMM.20.2.021007
dc.source.numberofpages11
dc.source.peerreviewyes
dc.source.beginpage021007
dc.source.journalJOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
dc.source.issue2
dc.source.volume20
imec.availabilityPublished - imec


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