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Integration of anodized tantalum capacitors in thin film MCM-D

dc.contributor.authorVan Dooren, Sofie
dc.contributor.authorBeyne, Eric
dc.date.accessioned2021-10-14T11:47:02Z
dc.date.available2021-10-14T11:47:02Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3924
dc.sourceIIOimport
dc.titleIntegration of anodized tantalum capacitors in thin film MCM-D
dc.typeOral presentation
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference4th IMAPS Advance Technology Workshop on Integrated Passives Technology
dc.source.conferencedate9/04/1999
dc.source.conferencelocationDenver, CO USA
imec.availabilityPublished - open access


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