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Environmentally conscious IC-manufacturing: a European perspective

dc.contributor.authorVan Hoeymissen, Jan
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-14T11:47:31Z
dc.date.available2021-10-14T11:47:31Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3929
dc.sourceIIOimport
dc.titleEnvironmentally conscious IC-manufacturing: a European perspective
dc.typeProceedings paper
dc.contributor.imecauthorHeyns, Marc
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage25
dc.source.endpage27
dc.source.conferenceInternational Forum on Semiconductor Technology - IFST 99. Digest of Technical Papers; 11-12 March 1999; Kyoto, Japan.
dc.source.conferencedate11/03/1999
dc.source.conferencelocationKyoto Japan
imec.availabilityPublished - open access


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