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Assessment of quadrupole mass spectrometry as an in situ HDP-CVD process diagnostic technique

dc.contributor.authorVan Hoeymissen, Jan
dc.contributor.authorHughes, Carolyn
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-14T11:47:36Z
dc.date.available2021-10-14T11:47:36Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3930
dc.sourceIIOimport
dc.titleAssessment of quadrupole mass spectrometry as an in situ HDP-CVD process diagnostic technique
dc.typeOral presentation
dc.contributor.imecauthorHeyns, Marc
dc.source.peerreviewno
dc.source.conferenceAVS 46th International Symposium; 25-29 October 1999; Seattle, WA, USA.
dc.source.conferencelocation
imec.availabilityPublished - imec


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