Automated Probe-Mark Analysis for Advanced Probe Technology Characterization

dc.contributor.author	Jian, Yu-Rong
dc.contributor.author	Fodor, Ferenc
dc.contributor.author	Wu, Cheng-Wen
dc.contributor.author	Marinissen, Erik Jan
dc.date.accessioned	2022-03-07T09:07:35Z
dc.date.available	2022-03-07T09:07:35Z
dc.date.issued	2021
dc.identifier.issn	2168-2356
dc.identifier.other	WOS:000701241400017
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/39317
dc.source	WOS
dc.title	Automated Probe-Mark Analysis for Advanced Probe Technology Characterization
dc.type	Journal article
dc.contributor.imecauthor	Fodor, Ferenc
dc.contributor.imecauthor	Marinissen, Erik Jan
dc.contributor.orcidimec	Marinissen, Erik Jan::0000-0002-5058-8303
dc.date.embargo	9999-12-31
dc.identifier.doi	10.1109/MDAT.2020.3034043
dc.source.numberofpages	8
dc.source.peerreview	yes
dc.source.beginpage	82
dc.source.endpage	89
dc.source.journal	IEEE DESIGN & TEST
dc.source.issue	5
dc.source.volume	38
imec.availability	Published - imec