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Automated Probe-Mark Analysis for Advanced Probe Technology Characterization
| dc.contributor.author | Jian, Yu-Rong | |
| dc.contributor.author | Fodor, Ferenc | |
| dc.contributor.author | Wu, Cheng-Wen | |
| dc.contributor.author | Marinissen, Erik Jan | |
| dc.date.accessioned | 2022-03-07T09:07:35Z | |
| dc.date.available | 2022-03-07T09:07:35Z | |
| dc.date.issued | 2021 | |
| dc.identifier.issn | 2168-2356 | |
| dc.identifier.other | WOS:000701241400017 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39317 | |
| dc.source | WOS | |
| dc.title | Automated Probe-Mark Analysis for Advanced Probe Technology Characterization | |
| dc.type | Journal article | |
| dc.contributor.imecauthor | Fodor, Ferenc | |
| dc.contributor.imecauthor | Marinissen, Erik Jan | |
| dc.contributor.orcidimec | Marinissen, Erik Jan::0000-0002-5058-8303 | |
| dc.identifier.doi | 10.1109/MDAT.2020.3034043 | |
| dc.source.numberofpages | 8 | |
| dc.source.peerreview | yes | |
| dc.source.beginpage | 82 | |
| dc.source.endpage | 89 | |
| dc.source.journal | IEEE DESIGN & TEST | |
| dc.source.issue | 5 | |
| dc.source.volume | 38 | |
| imec.availability | Under review | |
| imec.validator.reason | A new document was uploaded from CORE. |