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Optimisation of a plasma scrubber in the exhaust stream of a W-CVD tool

dc.contributor.authorVan Hoornick, Nausikaa
dc.contributor.authorVan Hoeymissen, Jan
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-14T11:47:47Z
dc.date.available2021-10-14T11:47:47Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3932
dc.sourceIIOimport
dc.titleOptimisation of a plasma scrubber in the exhaust stream of a W-CVD tool
dc.typeProceedings paper
dc.contributor.imecauthorVan Hoornick, Nausikaa
dc.contributor.imecauthorHeyns, Marc
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage125
dc.source.endpage130
dc.source.conference1999 Proceedings of the Institute of Environmental Science and Technology
dc.source.conferencedate2/05/1999
dc.source.conferencelocationOntario Canada
imec.availabilityPublished - open access


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