High performance raised gate/source/drain transistors for sub-0.15 μm CMOS technologies

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Authors
van Meer, Hans; Kubicek, Stefan; Lyu, Jeong-ho; Caymax, Matty; Loo, Roger; De Meyer, Kristin
Conference
ESSDERC'99 - Proceedings of the 29th European Solid-State Device Research Conference; 13-15 September 1999; Leuven, Belgium.
Title
High performance raised gate/source/drain transistors for sub-0.15 μm CMOS technologies
Publication type
Proceedings paper
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