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CNT pellicles: Imaging results of the first full-field EUV exposures

dc.contributor.authorBekaert, Joost
dc.contributor.authorGallagher, Emily
dc.contributor.authorJonckheere, Rik
dc.contributor.authorVan Look, Lieve
dc.contributor.authorAubert, Remko
dc.contributor.authorKlein, Alexander
dc.contributor.authorYegen, Gokay
dc.contributor.authorBroman, Par
dc.contributor.authorFelix, Nelson M.
dc.contributor.authorLio, Anna
dc.contributor.authorNair, Vineet Vijayakrishnan
dc.contributor.authorTimmermans, Marina
dc.contributor.authorPollentier, Ivan
dc.contributor.authorHendrickx, Eric
dc.date.accessioned2022-03-11T13:10:50Z
dc.date.available2022-03-11T13:10:50Z
dc.date.issued2021
dc.identifier.isbn978-1-5106-4051-1
dc.identifier.issn0277-786X
dc.identifier.otherWOS:000672825700021
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39409
dc.sourceWOS
dc.titleCNT pellicles: Imaging results of the first full-field EUV exposures
dc.typeProceedings paper
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorGallagher, Emily
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.imecauthorVan Look, Lieve
dc.contributor.imecauthorAubert, Remko
dc.contributor.imecauthorNair, Vineet Vijayakrishnan
dc.contributor.imecauthorTimmermans, Marina
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecNair, Vineet Vijayakrishnan::0000-0002-8970-2425
dc.contributor.orcidimecTimmermans, Marina::0000-0001-9805-8259
dc.identifier.doi10.1117/12.2584724
dc.identifier.eisbn978-1-5106-4052-8
dc.source.numberofpages9
dc.source.peerreviewyes
dc.source.beginpage116090Z
dc.source.conferenceConference on Extreme Ultraviolet (EUV) Lithography XII
dc.source.conferencedateFEB 22-26, 2021
dc.source.conferencelocationVirtual
dc.source.journalProceedings of SPIE
dc.source.volume11609
imec.availabilityPublished - imec


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