Authors

Chery, Emmanuel; Slabbekoorn, John; Pinho, Nelson; Miller, Andy; Beyne, Eric

DOI

10.1109/ECTC32696.2021.00064

EISBN

978-0-7381-4523-5

ISSN

0569-5503

Conference

IEEE 71st Electronic Components and Technology Conference (ECTC)

Journal

na

Title

Advances in Photosensitive Polymer Based Damascene RDL Processes: Toward Submicrometer Pitches With More Metal Layers

Publication type

Proceedings paper