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Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner- spacers and Epi-induced Stress: Understanding & Mitigating Process Risks
dc.contributor.author | Rawat, Amita | |
dc.contributor.author | Bhuwalka, Krishna K. | |
dc.contributor.author | Matagne, Philippe | |
dc.contributor.author | Vermeersch, Bjorn | |
dc.contributor.author | Wu, Hao | |
dc.contributor.author | Hellings, Geert | |
dc.contributor.author | Ryckaert, Julien | |
dc.contributor.author | Liu, Changze | |
dc.date.accessioned | 2022-04-08T02:10:43Z | |
dc.date.available | 2022-04-08T02:10:43Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 1930-8833 | |
dc.identifier.other | WOS:000766309500010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39598 | |
dc.source | WOS | |
dc.title | Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner- spacers and Epi-induced Stress: Understanding & Mitigating Process Risks | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Rawat, Amita | |
dc.contributor.imecauthor | Matagne, Philippe | |
dc.contributor.imecauthor | Vermeersch, Bjorn | |
dc.contributor.imecauthor | Hellings, Geert | |
dc.contributor.orcidimec | Vermeersch, Bjorn::0000-0001-8640-672X | |
dc.contributor.orcidimec | Hellings, Geert::0000-0002-5376-2119 | |
dc.identifier.doi | 10.1109/ESSCIRC53450.2021.9567879 | |
dc.identifier.eisbn | 978-1-6654-3751-6 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 55 | |
dc.source.endpage | 58 | |
dc.source.conference | 47th IEEE European Solid State Circuits Conference (ESSCIRC) | |
dc.source.conferencedate | SEP 06-09, 2021 | |
imec.availability | Under review |
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