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Nanometer profiling of carrier distributions within semiconductor devices

dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T11:50:27Z
dc.date.available2021-10-14T11:50:27Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3959
dc.sourceIIOimport
dc.titleNanometer profiling of carrier distributions within semiconductor devices
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceInternational Conference on Physics of Surfaces and Interfaces; June 1999; Goteborg, Sweden.
dc.source.conferencelocation
imec.availabilityPublished - imec


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