Authors

Vandervorst, Wilfried; Clarysse, Trudo; De Wolf, Peter; Eyben, Pierre; Haegeman, Bart; Xu, Mingwei; Trenkler, Thomas; Hantschel, Thomas; Stephenson, Robert

Conference

Materials Research Society Spring Meeting: Symposium S on Si Front-End Processing - Physics and Technology of Dopant-Defect Inte

Title

Nanometer scale characterization of deep submicron devices

Publication type

Oral presentation