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Energy and angular dependent profiling of thin (0.5 - 2.5 nm) oxide layers

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorConard, Thierry
dc.contributor.authorDe Witte, Hilde
dc.contributor.authorCooke, G. A.
dc.date.accessioned2021-10-14T11:50:54Z
dc.date.available2021-10-14T11:50:54Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3963
dc.sourceIIOimport
dc.titleEnergy and angular dependent profiling of thin (0.5 - 2.5 nm) oxide layers
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorConard, Thierry
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.conferenceSIMS XII; 5-10 September 1999; Brussel, Belgium.
dc.source.conferencelocation
imec.availabilityPublished - imec


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