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Two-level MOL and VHV routing style to enable extreme height scaling beyond 2nm technology node
dc.contributor.author | Chehab, Bilal | |
dc.contributor.author | Zografos, Odysseas | |
dc.contributor.author | Litta, Eugenio Dentoni | |
dc.contributor.author | Ahmed, Zubair | |
dc.contributor.author | Schuddinck, Pieter | |
dc.contributor.author | Jang, Doyoung | |
dc.contributor.author | Hellings, Geert | |
dc.contributor.author | Spessot, Alessio | |
dc.contributor.author | Weckx, Pieter | |
dc.contributor.author | Ryckaert, Julien | |
dc.date.accessioned | 2022-05-17T06:25:54Z | |
dc.date.available | 2022-05-05T02:17:26Z | |
dc.date.available | 2022-05-17T06:25:54Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 2380-632X | |
dc.identifier.other | WOS:000784773200057 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39737.2 | |
dc.source | WOS | |
dc.title | Two-level MOL and VHV routing style to enable extreme height scaling beyond 2nm technology node | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Chehab, Bilal | |
dc.contributor.imecauthor | Zografos, Odysseas | |
dc.contributor.imecauthor | Litta, Eugenio Dentoni | |
dc.contributor.imecauthor | Ahmed, Zubair | |
dc.contributor.imecauthor | Schuddinck, Pieter | |
dc.contributor.imecauthor | Jang, Doyoung | |
dc.contributor.imecauthor | Hellings, Geert | |
dc.contributor.imecauthor | Spessot, Alessio | |
dc.contributor.imecauthor | Weckx, Pieter | |
dc.contributor.imecauthor | Ryckaert, Julien | |
dc.contributor.orcidimec | Zografos, Odysseas::0000-0002-9998-8009 | |
dc.contributor.orcidimec | Hellings, Geert::0000-0002-5376-2119 | |
dc.contributor.orcidimec | Schuddinck, Pieter::0000-0003-1893-3135 | |
dc.identifier.doi | 10.1109/IITC51362.2021.9537557 | |
dc.identifier.eisbn | 978-1-7281-7632-1 | |
dc.source.numberofpages | 3 | |
dc.source.peerreview | yes | |
dc.source.conference | IEEE International Interconnect Technology Conference (IITC) | |
dc.source.conferencedate | JUL 06-09, 2021 | |
dc.source.conferencelocation | Virtual conference | |
dc.source.journal | Conference proceedings | |
imec.availability | Under review |