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Two-level MOL and VHV routing style to enable extreme height scaling beyond 2nm technology node

dc.contributor.authorChehab, Bilal
dc.contributor.authorZografos, Odysseas
dc.contributor.authorDentoni Litta, Eugenio
dc.contributor.authorAhmed, Zubair
dc.contributor.authorSchuddinck, Pieter
dc.contributor.authorJang, Doyoung
dc.contributor.authorHellings, Geert
dc.contributor.authorSpessot, Alessio
dc.contributor.authorWeckx, Pieter
dc.contributor.authorRyckaert, Julien
dc.date.accessioned2022-06-17T07:57:39Z
dc.date.available2022-05-05T02:17:26Z
dc.date.available2022-05-17T06:25:54Z
dc.date.available2022-06-17T07:57:39Z
dc.date.issued2021
dc.identifier.issn2380-632X
dc.identifier.otherWOS:000784773200057
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39737.3
dc.sourceWOS
dc.titleTwo-level MOL and VHV routing style to enable extreme height scaling beyond 2nm technology node
dc.typeProceedings paper
dc.contributor.imecauthorChehab, Bilal
dc.contributor.imecauthorZografos, Odysseas
dc.contributor.imecauthorDentoni Litta, Eugenio
dc.contributor.imecauthorAhmed, Zubair
dc.contributor.imecauthorSchuddinck, Pieter
dc.contributor.imecauthorJang, Doyoung
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorWeckx, Pieter
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.orcidimecZografos, Odysseas::0000-0002-9998-8009
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecSchuddinck, Pieter::0000-0003-1893-3135
dc.contributor.orcidimecDentoni Litta, Eugenio::0000-0003-0333-376X
dc.date.embargo9999-12-31
dc.identifier.doi10.1109/IITC51362.2021.9537557
dc.identifier.eisbn978-1-7281-7632-1
dc.source.numberofpages3
dc.source.peerreviewyes
dc.source.conferenceIEEE International Interconnect Technology Conference (IITC)
dc.source.conferencedateJUL 06-09, 2021
dc.source.conferencelocationVirtual conference
dc.source.journalConference proceedings
imec.availabilityPublished - open access


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320.500.12860/39737.3*2022-06-17T07:55:34Zvalidation by library/open access desk
220.500.12860/39737.22022-05-11T09:30:37Zvalidation by imec author
120.500.12860/397372022-05-05T02:17:26Z

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