Reliability of Barrierless PVD Mo

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dc.contributor.author	Tierno, Davide
dc.contributor.author	Hosseini, M.
dc.contributor.author	van der Veen, M.
dc.contributor.author	Dangol, A.
dc.contributor.author	Croes, K.
dc.contributor.author	Demuynck, S.
dc.contributor.author	Tokei, Z. S.
dc.contributor.author	Litta, E. D.
dc.contributor.author	Horiguchi, N.
dc.date.accessioned	2022-05-10T08:17:24Z
dc.date.available	2022-05-05T02:17:27Z
dc.date.available	2022-05-10T08:17:24Z
dc.date.issued	2021
dc.identifier.issn	2380-632X
dc.identifier.other	WOS:000784773200053
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/39742.2
dc.source	WOS
dc.title	Reliability of Barrierless PVD Mo
dc.type	Proceedings paper
dc.contributor.imecauthor	Tierno, Davide
dc.contributor.imecauthor	Hosseini, M.
dc.contributor.imecauthor	van der Veen, M.
dc.contributor.imecauthor	Dangol, A.
dc.contributor.imecauthor	Croes, K.
dc.contributor.imecauthor	Demuynck, S.
dc.contributor.imecauthor	Tokei, Z. S.
dc.contributor.imecauthor	Litta, E. D.
dc.contributor.imecauthor	Horiguchi, N.
dc.contributor.orcidimec	Tierno, Davide::0000-0003-4915-904X
dc.identifier.doi	10.1109/IITC51362.2021.9537545
dc.identifier.eisbn	978-1-7281-7632-1
dc.source.numberofpages	3
dc.source.peerreview	yes
dc.subject.discipline	Engineering
dc.source.conference	IEEE International Interconnect Technology Conference (IITC)
dc.source.conferencedate	JUL 06-09, 2021
dc.source.conferencelocation	Kyoto
dc.source.journal	2021 IEEE International Interconnect Technology Conference (IITC)
imec.availability	Under review

Version	Item	Date	Summary
3	20.500.12860/39742.3	2022-06-09T07:17:14Z	validation by library/open access desk
2	20.500.12860/39742.2*	2022-05-09T08:30:40Z	validation by imec author
1	20.500.12860/39742	2022-05-05T02:17:27Z

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