dc.contributor.author | Tierno, Davide | |
dc.contributor.author | Hosseini, Maryam | |
dc.contributor.author | van der Veen, Marleen | |
dc.contributor.author | Dangol, Anish | |
dc.contributor.author | Croes, Kristof | |
dc.contributor.author | Demuynck, Steven | |
dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | Dentoni Litta, Eugenio | |
dc.contributor.author | Horiguchi, Naoto | |
dc.date.accessioned | 2022-06-09T07:20:17Z | |
dc.date.available | 2022-05-05T02:17:27Z | |
dc.date.available | 2022-05-10T08:17:24Z | |
dc.date.available | 2022-06-09T07:20:17Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 2380-632X | |
dc.identifier.other | WOS:000784773200053 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39742.3 | |
dc.source | WOS | |
dc.title | Reliability of Barrierless PVD Mo | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Tierno, Davide | |
dc.contributor.imecauthor | Hosseini, Maryam | |
dc.contributor.imecauthor | van der Veen, Marleen | |
dc.contributor.imecauthor | Dangol, Anish | |
dc.contributor.imecauthor | Croes, Kristof | |
dc.contributor.imecauthor | Demuynck, Steven | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | Dentoni Litta, Eugenio | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.orcidimec | Tierno, Davide::0000-0003-4915-904X | |
dc.contributor.orcidimec | Hosseini, Maryam::0000-0002-0210-4095 | |
dc.contributor.orcidimec | van der Veen, Marleen::0000-0002-9402-8922 | |
dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
dc.contributor.orcidimec | Dentoni Litta, Eugenio::0000-0003-0333-376X | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.identifier.doi | 10.1109/IITC51362.2021.9537545 | |
dc.identifier.eisbn | 978-1-7281-7632-1 | |
dc.source.numberofpages | 3 | |
dc.source.peerreview | yes | |
dc.subject.discipline | Engineering | |
dc.source.conference | IEEE International Interconnect Technology Conference (IITC) | |
dc.source.conferencedate | JUL 06-09, 2021 | |
dc.source.conferencelocation | Kyoto | |
dc.source.journal | na | |
imec.availability | Published - open access | |