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Reliability of Barrierless PVD Mo
dc.contributor.author | Tierno, Davide | |
dc.contributor.author | Hosseini, M. | |
dc.contributor.author | van der Veen, M. | |
dc.contributor.author | Dangol, A. | |
dc.contributor.author | Croes, K. | |
dc.contributor.author | Demuynck, S. | |
dc.contributor.author | Tokei, Z. S. | |
dc.contributor.author | Litta, E. D. | |
dc.contributor.author | Horiguchi, N. | |
dc.date.accessioned | 2022-05-05T02:17:27Z | |
dc.date.available | 2022-05-05T02:17:27Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 2380-632X | |
dc.identifier.other | WOS:000784773200053 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39742 | |
dc.source | WOS | |
dc.title | Reliability of Barrierless PVD Mo | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Tierno, Davide | |
dc.contributor.imecauthor | Hosseini, M. | |
dc.contributor.imecauthor | van der Veen, M. | |
dc.contributor.imecauthor | Dangol, A. | |
dc.contributor.imecauthor | Croes, K. | |
dc.contributor.imecauthor | Demuynck, S. | |
dc.contributor.imecauthor | Tokei, Z. S. | |
dc.contributor.imecauthor | Litta, E. D. | |
dc.contributor.imecauthor | Horiguchi, N. | |
dc.contributor.orcidimec | Tierno, Davide::0000-0003-4915-904X | |
dc.identifier.doi | 10.1109/IITC51362.2021.9537545 | |
dc.identifier.eisbn | 978-1-7281-7632-1 | |
dc.source.numberofpages | 3 | |
dc.source.peerreview | yes | |
dc.source.conference | IEEE International Interconnect Technology Conference (IITC) | |
dc.source.conferencedate | JUL 06-09, 2021 | |
imec.availability | Under review |
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