First results of EUV-scanner compatibility tests performed on novel 'high-NA' reticle absorber materials

Stortelder, Jetske; Ebeling, Robert P.; Rijnsent, Corne; van Putten, Michel; de Rooij-Lohmann, Veronique; Smit, Maximilian; Storm, Arnold J.; Koster, Norbert; Lensen, Henk A.; Philipsen, Vicky; Opsomer, Karl; Thakare, Devesh; Feigl, Torsten; Naujok, Philipp

doi:10.1117/12.2600928

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First results of EUV-scanner compatibility tests performed on novel 'high-NA' reticle absorber materials

Date

2021

Proceedings Paper

https://doi.org/10.1117/12.2600928

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de Rooij-Lohmann, Veronique

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Proceedings of SPIE

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1712 since deposited on 2022-05-22

Acq. date: 2025-12-12

First results of EUV-scanner compatibility tests performed on novel 'high-NA' reticle absorber materials

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