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Extreme contact shrink for back end of line connectivity
dc.contributor.author | Schleicher, Filip | |
dc.contributor.author | Paolillo, Sara | |
dc.contributor.author | Decoster, Stefan | |
dc.contributor.author | Wu, Chen | |
dc.contributor.author | Vega Gonzalez, Victor | |
dc.contributor.author | Hasan, Mahmudul | |
dc.contributor.author | Beral, Christophe | |
dc.contributor.author | Lazzarino, Frederic | |
dc.date.accessioned | 2022-05-30T07:32:12Z | |
dc.date.available | 2022-05-29T02:20:57Z | |
dc.date.available | 2022-05-30T07:32:12Z | |
dc.date.issued | 2022-05-10 | |
dc.identifier.issn | 2166-2746 | |
dc.identifier.other | WOS:000795700400001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39901.2 | |
dc.source | WOS | |
dc.title | Extreme contact shrink for back end of line connectivity | |
dc.type | Journal article | |
dc.contributor.imecauthor | Schleicher, Filip | |
dc.contributor.imecauthor | Paolillo, Sara | |
dc.contributor.imecauthor | Decoster, Stefan | |
dc.contributor.imecauthor | Wu, Chen | |
dc.contributor.imecauthor | Vega Gonzalez, Victor | |
dc.contributor.imecauthor | Hasan, Mahmudul | |
dc.contributor.imecauthor | Beral, Christophe | |
dc.contributor.imecauthor | Lazzarino, Frederic | |
dc.contributor.orcidimec | Schleicher, Filip::0000-0003-3630-7285 | |
dc.contributor.orcidimec | Decoster, Stefan::0000-0003-1162-9288 | |
dc.contributor.orcidimec | Wu, Chen::0000-0002-4636-8842 | |
dc.contributor.orcidimec | Beral, Christophe::0000-0003-1356-9186 | |
dc.contributor.orcidimec | Lazzarino, Frederic::0000-0001-7961-9727 | |
dc.contributor.orcidimec | Vega Gonzalez, Victor::0000-0002-4320-0585 | |
dc.identifier.doi | 10.1116/6.0001757 | |
dc.source.numberofpages | 9 | |
dc.source.peerreview | yes | |
dc.subject.discipline | Materials science | |
dc.source.beginpage | 032803 | |
dc.source.journal | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | |
dc.source.issue | 3 | |
dc.source.volume | 40 | |
imec.availability | Under review |