Publication:

Extreme contact shrink for back end of line connectivity

Date

2022-05-10
Journal article
https://doi.org/10.1116/6.0001757
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Published version 5.47 MB
Accepted version 2.87 MB

Author(s)

Schleicher, Filip  
;
Paolillo, Sara  
;
Decoster, Stefan  
;
Wu, Chen  
;
Vega Gonzalez, Victor  
;
Hasan, Mahmudul  
;
Beral, Christophe  
;
Lazzarino, Frederic  

Journal

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

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