Publication:

Extreme contact shrink for back end of line connectivity

Date

2022-05-10
Journal article
https://doi.org/10.1116/6.0001757
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dc.contributor.authorSchleicher, Filip
dc.contributor.authorPaolillo, Sara
dc.contributor.authorDecoster, Stefan
dc.contributor.authorWu, Chen
dc.contributor.authorVega Gonzalez, Victor
dc.contributor.authorHasan, Mahmudul
dc.contributor.authorBeral, Christophe
dc.contributor.authorLazzarino, Frederic
dc.contributor.imecauthorSchleicher, Filip
dc.contributor.imecauthorPaolillo, Sara
dc.contributor.imecauthorDecoster, Stefan
dc.contributor.imecauthorWu, Chen
dc.contributor.imecauthorVega Gonzalez, Victor
dc.contributor.imecauthorHasan, Mahmudul
dc.contributor.imecauthorBeral, Christophe
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.orcidimecSchleicher, Filip::0000-0003-3630-7285
dc.contributor.orcidimecDecoster, Stefan::0000-0003-1162-9288
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.contributor.orcidimecBeral, Christophe::0000-0003-1356-9186
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.contributor.orcidimecVega Gonzalez, Victor::0000-0002-4320-0585
dc.contributor.orcidimecPaolillo, Sara::0000-0003-2798-5228
dc.date.accessioned2022-06-28T13:30:40Z
dc.date.available2022-05-29T02:20:57Z
dc.date.available2022-05-30T07:32:12Z
dc.date.available2022-06-28T13:30:40Z
dc.date.embargo2022-05-22
dc.date.issued2022-05-10
dc.description.wosFundingTextThe authors would like to acknowledge the etch tool supplier TEL and the organic liner supplier ASM for their contribution to this work and their much-appreciated scientific input: Yannick Feurprier, Kaushik Kumar, Xinghua Sun (TEL) and Yoann Tomczak, David de Roest (ASM). This project has received funding from the ECSEL Joint Undertaking (JU) under Grant Agreement No. 826422. The JU receives support from the European Union's Horizon 2020 research and innovation programme and Netherlands, Belgium, Germany, France, Romania, Israel.
dc.identifier.doi10.1116/6.0001757
dc.identifier.issn2166-2746
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39901
dc.publisherA V S AMER INST PHYSICS
dc.source.beginpage032803
dc.source.issue3
dc.source.journalJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
dc.source.numberofpages9
dc.source.volume40
dc.subject.disciplineMaterials science
dc.subject.keywordsBEOL
dc.subject.keywordsdry etch
dc.subject.keywordsshrink
dc.subject.keywordsvia
dc.subject.keywordscontact hole
dc.title

Extreme contact shrink for back end of line connectivity

dc.typeJournal article
dspace.entity.typePublication
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