dc.contributor.author | Schleicher, Filip | |
dc.contributor.author | Paolillo, Sara | |
dc.contributor.author | Decoster, Stefan | |
dc.contributor.author | Wu, Chen | |
dc.contributor.author | Vega Gonzalez, Victor | |
dc.contributor.author | Hasan, Mahmudul | |
dc.contributor.author | Beral, Christophe | |
dc.contributor.author | Lazzarino, Frederic | |
dc.date.accessioned | 2022-06-28T13:30:40Z | |
dc.date.available | 2022-05-29T02:20:57Z | |
dc.date.available | 2022-05-30T07:32:12Z | |
dc.date.available | 2022-06-28T13:30:40Z | |
dc.date.issued | 2022-05-10 | |
dc.identifier.issn | 2166-2746 | |
dc.identifier.other | WOS:000795700400001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39901.3 | |
dc.source | WOS | |
dc.title | Extreme contact shrink for back end of line connectivity | |
dc.type | Journal article | |
dc.contributor.imecauthor | Schleicher, Filip | |
dc.contributor.imecauthor | Paolillo, Sara | |
dc.contributor.imecauthor | Decoster, Stefan | |
dc.contributor.imecauthor | Wu, Chen | |
dc.contributor.imecauthor | Vega Gonzalez, Victor | |
dc.contributor.imecauthor | Hasan, Mahmudul | |
dc.contributor.imecauthor | Beral, Christophe | |
dc.contributor.imecauthor | Lazzarino, Frederic | |
dc.contributor.orcidimec | Schleicher, Filip::0000-0003-3630-7285 | |
dc.contributor.orcidimec | Decoster, Stefan::0000-0003-1162-9288 | |
dc.contributor.orcidimec | Wu, Chen::0000-0002-4636-8842 | |
dc.contributor.orcidimec | Beral, Christophe::0000-0003-1356-9186 | |
dc.contributor.orcidimec | Lazzarino, Frederic::0000-0001-7961-9727 | |
dc.contributor.orcidimec | Vega Gonzalez, Victor::0000-0002-4320-0585 | |
dc.contributor.orcidimec | Paolillo, Sara::0000-0003-2798-5228 | |
dc.date.embargo | 2022-05-22 | |
dc.identifier.doi | 10.1116/6.0001757 | |
dc.source.numberofpages | 9 | |
dc.source.peerreview | yes | |
dc.subject.discipline | Materials science | |
dc.source.beginpage | 032803 | |
dc.source.journal | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | |
dc.source.issue | 3 | |
dc.source.volume | 40 | |
imec.availability | Published - open access | |
dc.description.wosFundingText | The authors would like to acknowledge the etch tool supplier TEL and the organic liner supplier ASM for their contribution to this work and their much-appreciated scientific input: Yannick Feurprier, Kaushik Kumar, Xinghua Sun (TEL) and Yoann Tomczak, David de Roest (ASM). This project has received funding from the ECSEL Joint Undertaking (JU) under Grant Agreement No. 826422. The JU receives support from the European Union's Horizon 2020 research and innovation programme and Netherlands, Belgium, Germany, France, Romania, Israel. | |