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Local Enhancement of Dopant Diffusion from Polycrystalline Silicon Passivating Contacts
dc.contributor.author | Firat, Meric | |
dc.contributor.author | Wouters, Lennaert | |
dc.contributor.author | Lagrain, Pieter | |
dc.contributor.author | Haase, Felix | |
dc.contributor.author | Polzin, Jana-Isabelle | |
dc.contributor.author | Chaudhary, Aditya | |
dc.contributor.author | Nogay, Gizem | |
dc.contributor.author | Desrues, Thibaut | |
dc.contributor.author | Krugener, Jan | |
dc.contributor.author | Peibst, Robby | |
dc.contributor.author | Tous, Loic | |
dc.contributor.author | Radhakrishnan, Hariharsudan Sivaramakrishnan | |
dc.contributor.author | Poortmans, Jef | |
dc.date.accessioned | 2022-06-10T02:22:36Z | |
dc.date.available | 2022-06-10T02:22:36Z | |
dc.date.issued | 2022-APR 20 | |
dc.identifier.issn | 1944-8244 | |
dc.identifier.other | WOS:000797959300098 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39939 | |
dc.source | WOS | |
dc.title | Local Enhancement of Dopant Diffusion from Polycrystalline Silicon Passivating Contacts | |
dc.type | Journal article | |
dc.contributor.imecauthor | Firat, Meric | |
dc.contributor.imecauthor | Wouters, Lennaert | |
dc.contributor.imecauthor | Lagrain, Pieter | |
dc.contributor.imecauthor | Tous, Loic | |
dc.contributor.imecauthor | Radhakrishnan, Hariharsudan Sivaramakrishnan | |
dc.contributor.imecauthor | Poortmans, Jef | |
dc.contributor.orcidimec | Firat, Meric::0000-0002-6509-9668 | |
dc.contributor.orcidimec | Wouters, Lennaert::0000-0002-6730-9542 | |
dc.contributor.orcidimec | Lagrain, Pieter::0000-0003-3734-7203 | |
dc.contributor.orcidimec | Tous, Loic::0000-0001-9928-7774 | |
dc.contributor.orcidimec | Poortmans, Jef::0000-0003-2077-2545 | |
dc.identifier.doi | 10.1021/acsami.2c01801 | |
dc.source.numberofpages | 12 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 17975 | |
dc.source.endpage | 17986 | |
dc.source.journal | ACS APPLIED MATERIALS & INTERFACES | |
dc.identifier.pmid | MEDLINE:35380425 | |
dc.source.issue | 15 | |
dc.source.volume | 14 | |
imec.availability | Under review |
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