Local Enhancement of Dopant Diffusion from Polycrystalline Silicon Passivating Contacts

Firat, Meric; Wouters, Lennaert; Lagrain, Pieter; Haase, Felix; Polzin, Jana-Isabelle; Chaudhary, Aditya; Nogay, Gizem; Desrues, Thibaut; Krugener, Jan; Peibst, Robby; Tous, Loic; Sivaramakrishnan Radhakrishnan, Hariharsudan; Poortmans, Jef

doi:10.1021/acsami.2c01801

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Local Enhancement of Dopant Diffusion from Polycrystalline Silicon Passivating Contacts

Date

2022

Journal article

https://doi.org/10.1021/acsami.2c01801

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Polzin, Jana-Isabelle

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Sivaramakrishnan Radhakrishnan, Hariharsudan

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Poortmans, Jef

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ACS APPLIED MATERIALS & INTERFACES

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1451 since deposited on 2022-06-10

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Acq. date: 2026-08-20

Local Enhancement of Dopant Diffusion from Polycrystalline Silicon Passivating Contacts

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