Publication:

Local Enhancement of Dopant Diffusion from Polycrystalline Silicon Passivating Contacts

Date

2022
Journal article
https://doi.org/10.1021/acsami.2c01801
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dc.contributor.authorFirat, Meric
dc.contributor.authorWouters, Lennaert
dc.contributor.authorLagrain, Pieter
dc.contributor.authorHaase, Felix
dc.contributor.authorPolzin, Jana-Isabelle
dc.contributor.authorChaudhary, Aditya
dc.contributor.authorNogay, Gizem
dc.contributor.authorDesrues, Thibaut
dc.contributor.authorKrugener, Jan
dc.contributor.authorPeibst, Robby
dc.contributor.authorTous, Loic
dc.contributor.authorSivaramakrishnan Radhakrishnan, Hariharsudan
dc.contributor.authorPoortmans, Jef
dc.contributor.imecauthorFirat, Meric
dc.contributor.imecauthorWouters, Lennaert
dc.contributor.imecauthorLagrain, Pieter
dc.contributor.imecauthorTous, Loic
dc.contributor.imecauthorSivaramakrishnan Radhakrishnan, Hariharsudan
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecFirat, Meric::0000-0002-6509-9668
dc.contributor.orcidimecWouters, Lennaert::0000-0002-6730-9542
dc.contributor.orcidimecLagrain, Pieter::0000-0003-3734-7203
dc.contributor.orcidimecTous, Loic::0000-0001-9928-7774
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.contributor.orcidimecSivaramakrishnan Radhakrishnan, Hariharsudan::0000-0003-1963-273X
dc.date.accessioned2022-12-19T10:41:31Z
dc.date.available2022-06-10T02:22:36Z
dc.date.available2022-12-19T10:41:31Z
dc.date.issued2022
dc.description.wosFundingTextThis work was supported by the European Union's Horizon2020 Programme for research, technological development, and demonstration [Grant 857793] and by the Kuwait Foundation for the Advancement of Sciences [Grant CN18-15EE-01].
dc.identifier.doi10.1021/acsami.2c01801
dc.identifier.issn1944-8244
dc.identifier.pmidMEDLINE:35380425
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39939
dc.publisherAMER CHEMICAL SOC
dc.source.beginpage17975
dc.source.endpage17986
dc.source.issue15
dc.source.journalACS APPLIED MATERIALS & INTERFACES
dc.source.numberofpages12
dc.source.volume14
dc.subject.keywordsSOLAR-CELLS
dc.subject.keywordsPOLY-SI
dc.subject.keywordsBIPOLAR-TRANSISTORS
dc.subject.keywordsOXIDE
dc.subject.keywordsPOLYSILICON
dc.subject.keywordsJUNCTIONS
dc.subject.keywordsRESOLUTION
dc.title

Local Enhancement of Dopant Diffusion from Polycrystalline Silicon Passivating Contacts

dc.typeJournal article
dspace.entity.typePublication
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