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OrbitrapTM-SIMS analysis of advanced semiconductor inorganic structures
dc.contributor.author | Franquet, A. | |
dc.contributor.author | Spampinato, V. | |
dc.contributor.author | Kayser, S. | |
dc.contributor.author | Vandervorst, W. | |
dc.contributor.author | van der Heide, P. | |
dc.date.accessioned | 2022-06-17T02:26:47Z | |
dc.date.available | 2022-06-17T02:26:47Z | |
dc.date.issued | 2022-AUG | |
dc.identifier.issn | 0042-207X | |
dc.identifier.other | WOS:000806207500003 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39964 | |
dc.source | WOS | |
dc.title | OrbitrapTM-SIMS analysis of advanced semiconductor inorganic structures | |
dc.type | Journal article | |
dc.contributor.imecauthor | Franquet, A. | |
dc.contributor.imecauthor | Spampinato, V. | |
dc.contributor.imecauthor | Vandervorst, W. | |
dc.contributor.imecauthor | van der Heide, P. | |
dc.identifier.doi | 10.1016/j.vacuum.2022.111182 | |
dc.source.numberofpages | 7 | |
dc.source.peerreview | yes | |
dc.source.journal | VACUUM | |
dc.source.volume | 202 | |
imec.availability | Under review |
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