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OrbitrapTM-SIMS analysis of advanced semiconductor inorganic structures
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Authors
Franquet, Alexis
;
Spampinato, Valentina
;
Kayser, S.
;
Vandervorst, Wilfried
;
van der Heide, Paul
DOI
10.1016/j.vacuum.2022.111182
ISSN
0042-207X
Issue
na
Journal
VACUUM
Volume
202
Title
OrbitrapTM-SIMS analysis of advanced semiconductor inorganic structures
Publication type
Journal article
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2
20.500.12860/39964.2
*
2022-09-01T14:01:45Z
validation by library/open access desk
1
20.500.12860/39964
2022-06-17T02:26:47Z
*Selected version
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