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Fabrication and modeling of a silicon micro calorimeter

dc.contributor.authorVerhaegen, Katarina
dc.contributor.authorBaert, Kris
dc.date.accessioned2021-10-14T11:54:15Z
dc.date.available2021-10-14T11:54:15Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3996
dc.sourceIIOimport
dc.titleFabrication and modeling of a silicon micro calorimeter
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage75
dc.source.endpage79
dc.source.conferenceICM'99. The eleventh international conference on microelectronics. Proceedings;
dc.source.conferencelocation
imec.availabilityPublished - imec


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