A high-throughput silicon microphysiometer

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Authors
Verhaegen, Katarina; Baert, Kris; Puers, Bob; Sansen, Willy; Simaels, J.; Van Driessche, W.; Hermans, Lou; Mertens, Robert
Conference
BiOS'99; 23-29 February 1999; San Francisco, Ca, USA.
Title
A high-throughput silicon microphysiometer
Publication type
Oral presentation
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