Browsing Conference contributions by imec author "51dd2fdc6a2c4d8614c6c3db36b99ed113440520"
Now showing items 1-3 of 3
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At the Extreme of 3D-NAND Scaling: 25 nm Z-Pitch with 10 nm Word Line Cells
Rachidi, Sana; Arreghini, Antonio; Verreck, Devin; Donadio, Gabriele Luca; Banerjee, Kaustuv; Katcko, Kostantine; Oniki, Yusuke; Van den Bosch, Geert; Rosmeulen, Maarten (2022) -
First demonstration of ruthenium and molybdenum word lines integrated into 40nm ptch 3D NAND memory devices
Ajaykumar, Arjun; Breuil, Laurent; Katcko, Kostantine; Schleicher, Filip; Sebaai, Farid; Oniki, Yusuke; Ramesh, Siva; Arreghini, Antonio; Nyns, Laura; Soulie, Jean-Philippe; Stiers, Jimmy; Rosmeulen, Maarten; Van den Bosch, Geert (2021) -
Understanding the kinetics of Metal Induced Lateral Crystallization process to enhance the poly-Si channel quality and current conduction in 3-D NAND memory
Ramesh, Siva; Vadakupudhu Palayam, Senthil; Ajaykumar, Arjun; Opsomer, Karl; Bastos, Joao; Ragnarsson, Lars-Ake; Breuil, Laurent; Arreghini, Antonio; Wouters, Lennaert; Spampinato, Valentina; Favia, Paola; Nalin Mehta, Ankit; Carolan, Patrick; Nyns, Laura; Katcko, Kostantine; Stiers, Jimmy; Van den Bosch, Geert; Rosmeulen, Maarten (2021)