Browsing Conference contributions by author "Pacco, Antoine"
Now showing items 41-42 of 42
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Uniformity of particle removal by aerosol spray
Xu, XiuMei; Pacco, Antoine; Wada, Masayuki; Leunissen, Peter; Struyf, Herbert; Mertens, Paul (2010) -
Wet-chemical cleaning of cobalt and molybdenum for advanced interconnects
Le, Quoc Toan; Kesters, Els; Usman Ibrahim, Ansar; Klipp, Andreas; Pacco, Antoine; van der Veen, Marleen; Altamirano Sanchez, Efrain; Holsteyns, Frank (2020)