Browsing Conference contributions by imec author "7aea8710c58733525d84a859f79df52b7b082fa3"
Now showing items 1-6 of 6
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Atomic-Scale Investigations on the Wet Etching of Group IV Semiconductors in Acidic H2O2 Solution: The Case Ge Versus Si-Ge
van Dorp, Dennis; Abrenica, Graniel; Mayer, T.; Arnauts, Sophia; Altamirano Sanchez, Efrain; De Gendt, Stefan (2021-05) -
Characterization and (electro)chemical studies of halide-passivated Ge (100) surfaces in acidic solutions
Abrenica, Graniel; Lebedev, Mikhail; Le, Hy; Hajduk, Andreas; Fingerle, Mathias; Mayer, Thomas; De Gendt, Stefan; van Dorp, Dennis (2019) -
Photoelectrochemical etching inducing n-type Ge (100) pyramid texturization probed by integrated electrochemical chamber/X-ray photoelectron spectroscopy
Abrenica, Graniel; Lebedev, Mikhail; Le, Hy; Hajduk, Andreas; Fingerle, Mathias; Mayer, Thomas; De Gendt, Stefan; van Dorp, Dennis (2019) -
Surface Chemistry and Nanoscale Wet Etching of Group IV Semiconductors in Acidic H2O2 Solutions
lebedev, Mikhail; Mayer, Thomas; van Dorp, Dennis; Abrenica, Graniel; Arnauts, Sophia; Altamirano Sanchez, Efrain; De Gendt, Stefan (2021-02) -
Towards atomic-layer-scale processing of high mobility channel materials in acidic solutions for N5 and N7 technology nodes
van Dorp, Dennis; Arnauts, Sophia; Abrenica, Graniel; Holsteyns, Frank (2016) -
Unexpected pyramid texturization of n-type Ge (100) via electrochemical etching: bridging surface chemistry and morphology
Abrenica, Graniel; Lebedev, Mikhail; Le, Hy; Hajduk, Andreas; Fingerle, Mathias; Mayer, Thomas; De Gendt, Stefan; van Dorp, Dennis (2018)