Surface Chemistry and Nanoscale Wet Etching of Group IV Semiconductors in Acidic H2O2 Solutions

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Authors
lebedev, Mikhail; Mayer, Thomas; van Dorp, Dennis; Abrenica, Graniel; Arnauts, Sophia; Altamirano Sanchez, Efrain; De Gendt, Stefan
ISSN
na
Conference
UCPSS
Journal
Solid State Phenomena
Research discipline
Materials science
Title
Surface Chemistry and Nanoscale Wet Etching of Group IV Semiconductors in Acidic H2O2 Solutions
Publication type
Proceedings paper
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220.500.12860/38503.2*2022-06-24T09:34:16Zvalidation by library/open access desk
120.500.12860/385032021-11-30T17:04:50Z

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