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Surface Chemistry and Nanoscale Wet Etching of Group IV Semiconductors in Acidic H2O2 Solutions
Publication:
Surface Chemistry and Nanoscale Wet Etching of Group IV Semiconductors in Acidic H2O2 Solutions
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Date
2021
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
lebedev, Mikhail
;
Mayer, Thomas
;
van Dorp, Dennis
;
Abrenica, Graniel
;
Arnauts, Sophia
;
Altamirano Sanchez, Efrain
;
De Gendt, Stefan
Journal
Solid State Phenomena
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since deposited on 2021-11-30
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Statistics
Downloads
850
since deposited on 2021-11-30
35
last month
21
last week
Acq. date: 2026-07-21
Views
1663
since deposited on 2021-11-30
Acq. date: 2026-07-21
Citations